China's ultra-precision optical parts processing technology has entered the world's leading ranks

Abstract Ultra-precision optical component processing technology is widely used in many national major models including laser nuclear fusion projects. It is important to improve the speed and accuracy of this technology. The military newspaper reporter learned from the National University of Defense Technology that the School of Mechanical and Electrical Engineering and Automation...
Ultra-precision optical component processing technology is widely used in many national major models including laser nuclear fusion projects. It is important to improve the speed and accuracy of this technology. The military newspaper reporter learned from the National University of Defense Technology that the new generation of ultra-precision optical parts processing equipment independently developed by the School of Mechanical and Electrical Engineering and Automation of the school has recently passed the process assessment organized by relevant units. The assessment results show that the processing precision of the equipment achieves a sub-nanometer-level breakthrough, marking China's ultra-precision optical parts processing technology has entered the world's leading ranks.

Ultra-precision machining technology is the key technology for advanced equipment manufacturing. Nano-precision is known as the “Pearl of the Crown” for ultra-precision machining technology. In the past, due to the backwardness of optical parts processing technology in China, it was impossible to process optical parts with large diameter, high precision and complicated surface shape, which seriously restricted the technological progress in related fields. Since the 1980s, the school's precision engineering innovation team led by Professor Li Shengyi, after more than 30 years of hard work and independent innovation, has broken through the core technology of high-precision machine tool precision motion mechanism design, optical components sub-nano full-band error control, A series of magnetorheological and ion beam polishing equipments with independent intellectual property rights have been developed, which has broken the technical blockade of ultra-precision processing equipment in developed countries, making China a country that has mastered high-precision optical parts processing technology after the United States and Germany.

According to the observer network, the laser nuclear fusion device being developed in China requires a large number of high-precision, large-caliber optical components. To manufacture these optical components on schedule, quality and quantity, it is necessary to break through the existing technological level and adopt advanced and efficient technologies. technology. The progress of large-diameter optical parts processed by the traditional continuous polishing technology can meet the engineering requirements, but there are defects in long processing period and strong dependence on people.

In recent years, the school's precision engineering innovation team has successfully developed a new generation of ion beam polishing machine tools and digitally controlled light under the support of the National Science and Technology Special Project Phase II of the “Great Scale Integrated Circuit Manufacturing Equipment and Complete Process” and the National Natural Science Foundation. With a smoothing machine, the minimum controllable material removal is 0.1 nanometers. Relevant experts pointed out that this independent innovation can provide strong technical support and equipment support for major national science and technology projects such as “very large-scale integrated circuit manufacturing equipment and complete sets of processes” and “high-resolution Earth observation system”, which will directly promote related fields. Key technological breakthroughs are of great significance for improving the level of advanced equipment manufacturing in China.

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